Inventor · disambiguated record
Matthew Nicholls
Also filed as: NICHOLLS MATTHEW C
9 granted patents·68 citations·filing 2001–2006
87Inventor score
Files withIBM9
Top patents by PatentIndex Score
9 records- 0179US7372158B2HDP-based ILD capping layerIBM·Filed 2006·Granted May 13, 2008·8 cites·15 claims
- 0276US6716559B2Method and system for determining overlay toleranceIBM·Filed 2001·Granted Apr 6, 2004·16 cites·18 claims
- 0375US7138717B2HDP-based ILD capping layerIBM·Filed 2004·Granted Nov 21, 2006·19 cites·10 claims
- 0473US7538344B2Overlay and CD process window structureIBM·Filed 2005·Granted May 26, 2009·4 cites·9 claims
- 0562US6967709B2Overlay and CD process window structureIBM·Filed 2003·Granted Nov 22, 2005·7 cites·8 claims
- 0656US6766507B2Mask/wafer control structure and algorithm for placementIBM·Filed 2002·Granted Jul 20, 2004·5 cites·6 claims
- 0755US6674516B2Method of photolithographic exposure dose control as a function of resist sensitivityIBM·Filed 2002·Granted Jan 6, 2004·4 cites·7 claims
- 0850US7060626B2Multi-run selective pattern and etch wafer processIBM·Filed 2003·Granted Jun 13, 2006·5 cites·20 claims
- 0940US6856378B2Method of photolithographic exposure dose control as a function of resist sensitivityIBM·Filed 2003·Granted Feb 15, 2005·0 cites·11 claims
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