Inventor · disambiguated record
Christof Metzmacher
Also filed as: METZMACHER CHRISTOF
17 granted patents·5 pending applications·310 citations·filing 2002–2022
91Inventor score
Files withKONINKL PHILIPS ELECTRONICS NV5METZMACHER CHRISTOF5DERRA GUENTHER HANS2USHIO ELECTRIC INC2ZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
22 records- 0198US7466213B2Resonator structure and method of producing itNXP BV·Filed 2004·Granted Dec 16, 2008·267 cites·11 claims
- 0283US8097092B2Method of cleaning and after treatment of optical surfaces in an irradiation unitDERRA GUENTHER HANS·Filed 2006·Granted Jan 17, 2012·9 cites·12 claims
- 0382US8076655B2Method of cleaning optical surfaces of an irradiation unit in a two-step processDERRA GUENTHER HANS·Filed 2006·Granted Dec 13, 2011·8 cites·19 claims
- 0479US8721778B2Foil trap device with improved heat resistanceMETZMACHER CHRISTOF·Filed 2010·Granted May 13, 2014·3 cites·7 claims
- 0575US8049188B2Method of cleaning a surface region covered with contaminant or undesirable materialKONINKL PHILIPS ELECTRONICS NV·Filed 2007·Granted Nov 1, 2011·4 cites·15 claims
- 0665US8519367B2Extreme UV radiation generating device comprising a corrosion-resistant materialMETZMACHER CHRISTOF·Filed 2009·Granted Aug 27, 2013·6 cites·8 claims
- 0763US8891058B2Extreme UV radiation generating device comprising a contamination captorMETZMACHER CHRISTOF·Filed 2009·Granted Nov 18, 2014·6 cites·7 claims
- 0862US8693090B2Extreme UV radiation reflecting element comprising a sputter-resistant materialMETZMACHER CHRISTOF·Filed 2009·Granted Apr 8, 2014·1 cites·7 claims
- 0961US9599812B2Foil trap and light source device using such foil trapUSHIO ELECTRIC INC·Filed 2014·Granted Mar 21, 2017·1 cites·16 claims
- 1053US11550225B2EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation sourceZEISS CARL SMT GMBH·Filed 2021·Granted Jan 10, 2023·0 cites·13 claims
- 1152US9897724B2Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivityKONINKLIJKE PHILIPS NV·Filed 2015·Granted Feb 20, 2018·0 cites·16 claims
- 1250US9421647B2Method of manufacturing mirror shells of a nested shells grazing incidence mirrorUSHIO ELECTRIC INC·Filed 2013·Granted Aug 23, 2016·0 cites·9 claims
- 1350US6975182B2Filter system with bulk wave resonator having a reflection layer composition that varies with the layer thicknessKONINKL PHILIPS ELECTRONICS NV·Filed 2002·Granted Dec 13, 2005·4 cites·11 claims
- 1450US2014097914A1Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filtersTRIQUINT SEMICONDUCTOR INC·Filed 2013·Application pending·0 cites
- 1549US9110390B2Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivityZINK PETER·Filed 2007·Granted Aug 18, 2015·0 cites·9 claims
- 1646US2010194313A1High voltage electrical connection lineKONINKL PHILIPS ELECTRONICS NV·Filed 2008·Application pending·0 cites
- 1743US12292690B2Insert for a source chamber of an EUV radiation sourceZEISS CARL SMT GMBH·Filed 2022·Granted May 6, 2025·0 cites·20 claims
- 1842US8749178B2Electrode system, in particular for gas discharge light sourcesMETZMACHER CHRISTOF·Filed 2010·Granted Jun 10, 2014·0 cites·11 claims
- 1940US7119637B2Filter system comprising a bulk acoustic wave resonatorKONINKL PHILIPS ELECTRONICS NV·Filed 2002·Granted Oct 10, 2006·1 cites·7 claims
- 2037US2006043507A1Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filtersLOBL HANS·Filed 2003·Application pending·0 cites
- 2136US2010001814A1Thin film acoustic reflector stackKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Application pending·0 cites
- 2234US2005199972A1Bulk wave resonator and bulk wave filterFiled 2003·Application pending·0 cites
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