Inventor · disambiguated record
Harold R. Kaufman
Also filed as: KAUFMAN HAROLD R · PHILLIPS CHERYL A
38 granted patents·2 pending applications·1,415 citations·filing 1974–2014
98Inventor score
Top patents by PatentIndex Score
40 records- 0198US4862032AEnd-Hall ion sourceKAUFMAN HAROLD R·Filed 1986·Granted Aug 29, 1989·204 cites·21 claims
- 0298US4588490AHollow cathode enhanced magnetron sputter deviceIBM·Filed 1985·Granted May 13, 1986·133 cites·17 claims
- 0397US4684848ABroad-beam electron sourceKAUFMAN & ROBINSON INC·Filed 1985·Granted Aug 4, 1987·105 cites·23 claims
- 0496US4259145AIon source for reactive ion etchingIBM·Filed 1979·Granted Mar 31, 1981·47 cites·7 claims
- 0595US5763989AClosed drift ion source with improved magnetic fieldFRONT RANGE FAKEL INC·Filed 1996·Granted Jun 9, 1998·119 cites·10 claims
- 0695US4523971AProgrammable ion beam patterning systemIBM·Filed 1984·Granted Jun 18, 1985·75 cites·18 claims
- 0794US4481062AElectron bombardment ion sourcesKAUFMAN HAROLD R·Filed 1984·Granted Nov 6, 1984·55 cites·6 claims
- 0893US6608431B1Modular gridless ion sourceKAUFMAN & ROBINSON INC·Filed 2002·Granted Aug 19, 2003·45 cites·24 claims
- 0993US4446403ACompact plug connectable ion sourceIBM·Filed 1982·Granted May 1, 1984·43 cites·8 claims
- 1092US6750600B2Hall-current ion sourceKAUFMAN & ROBINSON INC·Filed 2001·Granted Jun 15, 2004·51 cites·14 claims
- 1192US4633129AHollow cathodeIBM·Filed 1985·Granted Dec 30, 1986·50 cites·9 claims
- 1290US4419203AApparatus and method for neutralizing ion beamsIBM·Filed 1982·Granted Dec 6, 1983·37 cites·8 claims
- 1390US3969646AElectron-bombardment ion source including segmented anode of electrically conductive, magnetic materialION TECH INC·Filed 1975·Granted Jul 13, 1976·36 cites·13 claims
- 1489US4873467AIon source with particular grid assemblyKAUFMAN HAROLD R·Filed 1988·Granted Oct 10, 1989·54 cites·17 claims
- 1589US3956666AElectron-bombardment ion sourcesION TECH INC·Filed 1975·Granted May 11, 1976·33 cites·14 claims
- 1688US5274306ACapacitively coupled radiofrequency plasma sourceKAUFMAN & ROBINSON INC·Filed 1992·Granted Dec 28, 1993·57 cites·28 claims
- 1787US6454910B1Ion-assisted magnetron depositionKAUFMAN & ROBINSON INC·Filed 2001·Granted Sep 24, 2002·41 cites·8 claims
- 1886US4541890AHall ion generator for working surfaces with a low energy high intensity ion beamIBM·Filed 1984·Granted Sep 17, 1985·26 cites·14 claims
- 1985US8994258B1End-hall ion source with enhanced radiation coolingKAUFMAN HAROLD R·Filed 2013·Granted Mar 31, 2015·7 cites·17 claims
- 2083US6870164B1Pulsed operation of hall-current ion sourcesKAUFMAN & ROBINSON INC·Filed 2000·Granted Mar 22, 2005·20 cites·9 claims
- 2183US6724160B2Ion-source neutralization with a hot-filament cathode-neutralizerKAUFMAN & ROBINSON INC·Filed 2003·Granted Apr 20, 2004·19 cites·6 claims
- 2283US6456011B1Magnetic field for small closed-drift ion sourceFRONT RANGE FAKEL INC·Filed 2001·Granted Sep 24, 2002·39 cites·8 claims
- 2382US7667379B2Industrial hollow cathode with radiation shield structureKAUFMAN & ROBINSON INC·Filed 2006·Granted Feb 23, 2010·6 cites·12 claims
- 2481US3952228AElectron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamletsION TECH INC·Filed 1974·Granted Apr 20, 1976·18 cites·19 claims
- 2580US10068739B2End-hall ion source with enhanced radiation coolingKAUFMAN & ROBINSON INC·Filed 2014·Granted Sep 4, 2018·4 cites·22 claims
- 2677US6864485B2Ion optics with shallow dished gridsKAUFMAN & ROBINSON INC·Filed 2001·Granted Mar 8, 2005·13 cites·10 claims
- 2769US4471224AApparatus and method for generating high current negative ionsIBM·Filed 1982·Granted Sep 11, 1984·13 cites·7 claims
- 2867US4954751ARadio frequency hollow cathodeKAUFMAN HAROLD R·Filed 1988·Granted Sep 4, 1990·14 cites·12 claims
- 2963US7728498B2Industrial hollow cathodeKAUFMAN & ROBINSON INC·Filed 2006·Granted Jun 1, 2010·2 cites·16 claims
- 3060US6843891B2Apparatus for sputter depositionKAUFMAN & ROBINSON INC·Filed 2001·Granted Jan 18, 2005·4 cites·17 claims
- 3155US6911789B2Power supply for a hot-filament cathodeADVANCED ENERGY IND INC·Filed 2003·Granted Jun 28, 2005·2 cites·10 claims
- 3253US6682634B1Apparatus for sputter depositionKAUFMAN & ROBINSON INC·Filed 1999·Granted Jan 27, 2004·10 cites·1 claims
- 3352US7843138B2Power supply for a hot-filament cathodeKAUFMAN & ROBINSON INC·Filed 2008·Granted Nov 30, 2010·0 cites·8 claims
- 3452US6323586B1Closed drift hollow cathodeFRONT RANGE FAKEL INC·Filed 1999·Granted Nov 27, 2001·10 cites·8 claims
- 3552US6246162B1Ion opticsKAUFMAN & ROBINSON INC·Filed 1999·Granted Jun 12, 2001·10 cites·9 claims
- 3642US8698401B2Mitigation of plasma-inductor terminationKAUFMAN HAROLD R·Filed 2010·Granted Apr 15, 2014·0 cites·24 claims
- 3741US5154635ACoaxial vacuum cableKAUFMAN HAROLD R·Filed 1991·Granted Oct 13, 1992·10 cites·11 claims
- 3839US2004000853A1Industrial hollow cathodeFiled 2003·Application pending·0 cites
- 3937US5793195AAngular distribution probeKAUFMAN & ROBINSON INC·Filed 1995·Granted Aug 11, 1998·3 cites·12 claims
- 4036US2001045352A1Sputter deposition using multiple targetsFiled 2001·Application pending·0 cites
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