Inventor · disambiguated record
Sonoko Tohda
Also filed as: TOHDA SONOKO
5 granted patents·1 pending application·100 citations·filing 1996–2004
82Inventor score
Technology areasH10W
Top patents by PatentIndex Score
6 records- 0186US5904556AMethod for making semiconductor integrated circuit device having interconnection structure using tungsten filmHITACHI LTD·Filed 1996·Granted May 18, 1999·63 cites·15 claims
- 0277US6780757B2Semiconductor integrated circuit device and method for making the sameRENESAS TECH CORP·Filed 2003·Granted Aug 24, 2004·17 cites·6 claims
- 0373US6583049B2Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 2001·Granted Jun 24, 2003·13 cites·7 claims
- 0443US6300237B1Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 1999·Granted Oct 9, 2001·7 cites·23 claims
- 0542US2004235289A1Semiconductor integrated circuit device and method for making the sameFiled 2004·Application pending·0 cites
- 0640US6538329B2Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 2001·Granted Mar 25, 2003·0 cites·6 claims
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