Inventor · disambiguated record
James P. Levin
Also filed as: LEVIN JAMES P
10 granted patents·107 citations·filing 1982–2016
87Inventor score
Files withIBM10
Top patents by PatentIndex Score
10 records- 0186US5149974AGas delivery for ion beam deposition and etchingIBM·Filed 1990·Granted Sep 22, 1992·56 cites·11 claims
- 0278US4388386AMask set mismatchIBM·Filed 1982·Granted Jun 14, 1983·31 cites·10 claims
- 0366US7754394B2Method to etch chrome for photomask fabricationIBM·Filed 2006·Granted Jul 13, 2010·2 cites·12 claims
- 0460US6777137B2EUVL mask structure and method of formationIBM·Filed 2002·Granted Aug 17, 2004·7 cites·20 claims
- 0557US9372394B2Test pattern layout for test photomask and method for evaluating critical dimension changesIBM·Filed 2014·Granted Jun 21, 2016·0 cites·14 claims
- 0655US9996000B2Test pattern layout for test photomask and method for evaluating critical dimension changesIBM·Filed 2016·Granted Jun 12, 2018·0 cites·17 claims
- 0755US9989843B2Test pattern layout for test photomask and method for evaluating critical dimension changesIBM·Filed 2016·Granted Jun 5, 2018·0 cites·6 claims
- 0839US5159170AGrid structure for reducing current density in focussed ion beamIBM·Filed 1991·Granted Oct 27, 1992·7 cites·2 claims
- 0934US6270949B1Single component developer for copolymer resistsIBM·Filed 1999·Granted Aug 7, 2001·4 cites·6 claims
- 1032US6426177B2Single component developer for use with ghost exposureIBM·Filed 2000·Granted Jul 30, 2002·0 cites·6 claims
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