Inventor · disambiguated record
Oscar K. Hsu
Also filed as: HSU OSCAR K · HSU OSCAR KAI CHI
25 granted patents·330 citations·filing 2000–2014
96Inventor score
Top patents by PatentIndex Score
25 records- 0194US6383066B1Multilayered polishing pad, method for fabricating, and use thereofIBM·Filed 2000·Granted May 7, 2002·91 cites·14 claims
- 0293US9375822B2Polishing pad having micro-grooves on the pad surfaceFNS TECH CO LTD·Filed 2014·Granted Jun 28, 2016·12 cites·4 claims
- 0392US6656018B1Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particlesFREUDENBERG NONWOVENS LTD PART·Filed 2000·Granted Dec 2, 2003·44 cites·33 claims
- 0491US9162341B2Chemical-mechanical planarization pad including patterned structural domainsINNOPAD INC·Filed 2013·Granted Oct 20, 2015·15 cites·5 claims
- 0589US7186166B2Fiber embedded polishing padFREUDENBERG NONWOVENS LTD·Filed 2005·Granted Mar 6, 2007·13 cites·5 claims
- 0686US8172648B2Chemical-mechanical planarization padLEFEVRE PAUL·Filed 2008·Granted May 8, 2012·13 cites·16 claims
- 0784US8684794B2Chemical mechanical planarization pad with void networkLEFEVRE PAUL·Filed 2008·Granted Apr 1, 2014·15 cites·25 claims
- 0884US6712681B1Polishing pads with polymer filled fibrous web, and methods for fabricating and using sameIBM·Filed 2000·Granted Mar 30, 2004·26 cites·24 claims
- 0984US6340325B1Polishing pad grooving method and apparatusIBM·Filed 2000·Granted Jan 22, 2002·31 cites·19 claims
- 1080US6964604B2Fiber embedded polishing padFREUDENBERG NONWOVENS LTD·Filed 2004·Granted Nov 15, 2005·19 cites·22 claims
- 1176US7534163B2Polishing padINNOPAD INC·Filed 2008·Granted May 19, 2009·4 cites·8 claims
- 1276US6890244B2Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particlesFREUDENBERG NONWOVENS LTD PART·Filed 2003·Granted May 10, 2005·15 cites·42 claims
- 1374US8900036B2Polishing pad having micro-grooves on the pad surfaceHSU OSCAR K·Filed 2012·Granted Dec 2, 2014·2 cites·15 claims
- 1470US8137166B2Polishing pad having micro-grooves on the pad surfaceHSU OSCAR K·Filed 2007·Granted Mar 20, 2012·3 cites·18 claims
- 1570US7086932B2Polishing padFREUDENBERG NONWOVENS·Filed 2004·Granted Aug 8, 2006·13 cites·12 claims
- 1667US8758659B2Method of grooving a chemical-mechanical planarization padLEFEVRE PAUL·Filed 2010·Granted Jun 24, 2014·2 cites·19 claims
- 1767US8430721B2Chemical-mechanical planarization padHSU OSCAR K·Filed 2008·Granted Apr 30, 2013·3 cites·16 claims
- 1867US7357704B2Polishing padINNOPAD INC·Filed 2006·Granted Apr 15, 2008·2 cites·20 claims
- 1962US8435099B2Chemical-mechanical planarization pad including patterned structural domainsLEFEVRE PAUL·Filed 2010·Granted May 7, 2013·1 cites·14 claims
- 2061US8546260B2Fabric containing non-crimped fibers and methods of manufactureHSU OSCAR K·Filed 2009·Granted Oct 1, 2013·1 cites·22 claims
- 2161US8491360B2Three-dimensional network in CMP padLEFEVRE PAUL·Filed 2008·Granted Jul 23, 2013·2 cites·28 claims
- 2261US7985121B2Chemical-mechanical planarization pad having end point detection windowINNOPAD INC·Filed 2008·Granted Jul 26, 2011·2 cites·17 claims
- 2360US9796063B2Multi-layered chemical-mechanical planarization padFNS TECH CO LTD·Filed 2014·Granted Oct 24, 2017·0 cites·13 claims
- 2456US8377351B2Polishing pad with controlled void formationINNOPAD INC·Filed 2008·Granted Feb 19, 2013·1 cites·16 claims
- 2551US8790165B2Multi-layered chemical-mechanical planarization padLEFEVRE PAUL·Filed 2010·Granted Jul 29, 2014·0 cites·8 claims
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