Inventor · disambiguated record
Kazutoshi Murata
Also filed as: MURATA KAZUTOSHI
7 granted patents·4 pending applications·31 citations·filing 2002–2011
80Inventor score
Files withMITSUI SHIPBUILDING ENG3MURATA KAZUTOSHI2TACHIBANA HIROYUKI2TAKIZAWA KAZUKI2MITSUI ENGINEERING CO LTD1
Top patents by PatentIndex Score
11 records- 0180US8202367B2Atomic layer growing apparatusTACHIBANA HIROYUKI·Filed 2007·Granted Jun 19, 2012·6 cites·4 claims
- 0272US7022545B2Production method of SiC monitor waferMITSUI SHIPBUILDING ENG·Filed 2003·Granted Apr 4, 2006·11 cites·7 claims
- 0365US8440268B2Method and apparatus for growing plasma atomic layerWASHIO KEISUKI·Filed 2007·Granted May 14, 2013·5 cites·4 claims
- 0462US6995036B2Production method of α-SiC waferMITSUI SHIPBUILDING ENG·Filed 2002·Granted Feb 7, 2006·7 cites·6 claims
- 0557US9068261B2Atomic layer deposition apparatus and thin film forming methodMURATA KAZUTOSHI·Filed 2010·Granted Jun 30, 2015·2 cites·5 claims
- 0649US2011017135A1Tomic layer film forming apparatusMURATA KAZUTOSHI·Filed 2009·Application pending·0 cites
- 0745US2011008550A1Atomic layer growing apparatus and thin film forming methodMITSUI SHIPBUILDING ENG·Filed 2009·Application pending·0 cites
- 0841US9194043B2Atomic layer deposition apparatusTACHIBANA HIROYUKI·Filed 2010·Granted Nov 24, 2015·0 cites·4 claims
- 0941US2013104803A1Thin film forming apparatusTAKIZAWA KAZUKI·Filed 2011·Application pending·0 cites
- 1035US2011293853A1Thin film forming apparatus and thin film forming methodTAKIZAWA KAZUKI·Filed 2010·Application pending·0 cites
- 1129US7544249B2Large-diameter SiC wafer and manufacturing method thereofMITSUI ENGINEERING CO LTD·Filed 2003·Granted Jun 9, 2009·0 cites·2 claims
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