Inventor · disambiguated record
Matthew J. Rutten
Also filed as: RUTTEN MATTHEW J · RUTTEN MATTHEW JEREMY
23 granted patents·1,330 citations·filing 1992–2001
97Inventor score
Files withIBM23
Top patents by PatentIndex Score
23 records- 0194US6110832AMethod and apparatus for slurry polishingIBM·Filed 1999·Granted Aug 29, 2000·157 cites·18 claims
- 0294US5676587ASelective polish process for titanium, titanium nitride, tantalum and tantalum nitrideIBM·Filed 1995·Granted Oct 14, 1997·231 cites·5 claims
- 0391US6495917B1Method and structure of column interconnectIBM·Filed 2000·Granted Dec 17, 2002·71 cites·13 claims
- 0491US5913713ACMP polishing pad backside modifications for advantageous polishing resultsIBM·Filed 1997·Granted Jun 22, 1999·95 cites·27 claims
- 0591US5889293AElectrical contact to buried SOI structuresIBM·Filed 1997·Granted Mar 30, 1999·103 cites·9 claims
- 0691US5312777AFabrication methods for bidirectional field emission devices and storage structuresIBM·Filed 1992·Granted May 17, 1994·64 cites·8 claims
- 0789US5876266APolishing pad with controlled release of desired micro-encapsulated polishing agentsIBM·Filed 1997·Granted Mar 2, 1999·84 cites·33 claims
- 0888US5704987AProcess for removing residue from a semiconductor wafer after chemical-mechanical polishingIBM·Filed 1996·Granted Jan 6, 1998·104 cites·9 claims
- 0986US5708559APrecision analog metal-metal capacitorIBM·Filed 1995·Granted Jan 13, 1998·85 cites·10 claims
- 1084US6503827B1Method of reducing planarization defectsIBM·Filed 2000·Granted Jan 7, 2003·42 cites·24 claims
- 1183US5896870AMethod of removing slurry particlesIBM·Filed 1997·Granted Apr 27, 1999·55 cites·27 claims
- 1280US6008083APrecision analog metal-metal capacitorIBM·Filed 1997·Granted Dec 28, 1999·59 cites·21 claims
- 1380US5549511AVariable travel carrier device and method for planarizing semiconductor wafersIBM·Filed 1994·Granted Aug 27, 1996·31 cites·5 claims
- 1471US6071803AElectrical contact to buried SOI structuresIBM·Filed 1998·Granted Jun 6, 2000·34 cites·6 claims
- 1561US5877589AGas discharge devices including matrix materials with ionizable gas filled sealed cavitiesIBM·Filed 1997·Granted Mar 2, 1999·14 cites·24 claims
- 1657US5722879AVariable travel carrier device and method for planarizing semiconductor wafersIBM·Filed 1996·Granted Mar 3, 1998·15 cites·12 claims
- 1757US5530262ABidirectional field emission devices, storage structures and fabrication methodsIBM·Filed 1995·Granted Jun 25, 1996·11 cites·23 claims
- 1855US6171436B1Apparatus for removing slurry particlesIBM·Filed 1998·Granted Jan 9, 2001·16 cites·30 claims
- 1955US5928062AVertical polishing device and methodIBM·Filed 1997·Granted Jul 27, 1999·17 cites·29 claims
- 2051US6245668B1Sputtered tungsten diffusion barrier for improved interconnect robustnessIBM·Filed 1998·Granted Jun 12, 2001·14 cites·22 claims
- 2151US5585674ATransverse diffusion barrier interconnect structureIBM·Filed 1995·Granted Dec 17, 1996·14 cites·15 claims
- 2250US5488013AMethod of forming transverse diffusion barrier interconnect structureIBM·Filed 1995·Granted Jan 30, 1996·14 cites·5 claims
- 2340US6838364B2Sputtered tungsten diffusion barrier for improved interconnect robustnessIBM·Filed 2001·Granted Jan 4, 2005·0 cites·17 claims
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