Inventor · disambiguated record
Hideji Goto
Also filed as: GOTO HIDEJI
6 granted patents·176 citations·filing 1994–2000
86Inventor score
Technology areasG03F
Top patents by PatentIndex Score
6 records- 0191US5486896AExposure apparatusNIKON CORP·Filed 1994·Granted Jan 23, 1996·80 cites·13 claims
- 0275US5777722AScanning exposure apparatus and methodNIKON CORP·Filed 1996·Granted Jul 7, 1998·39 cites·34 claims
- 0374US5502313AExposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical systemNIKON CORP·Filed 1994·Granted Mar 26, 1996·26 cites·10 claims
- 0465US6325516B1Exposure apparatus and field stop thereofNIPPON KOGAKU KK·Filed 2000·Granted Dec 4, 2001·7 cites·19 claims
- 0559US6213607B1Exposure apparatus and field stop thereofNIKON CORP·Filed 1999·Granted Apr 10, 2001·16 cites·22 claims
- 0639US5936712AExposure method and apparatus including focus controlNIKON CORP·Filed 1998·Granted Aug 10, 1999·8 cites·24 claims
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