Inventor · disambiguated record
Mu-Tsang Lin
Also filed as: LIN MU · LIN MU-TSANG
42 granted patents·8 pending applications·149 citations·filing 2000–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD36TAIWAN SEMICONDUCTOR MFG12SEMICONDUCTOR MFG CO LID1STRIPE INC1
Top patents by PatentIndex Score
50 records- 0193US10811516B2Structure and formation method of semiconductor device structure with gate stackTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 20, 2020·6 cites·20 claims
- 0293US9735256B2Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 15, 2017·7 cites·20 claims
- 0392US10355135B2Semiconductor structure and fabricating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jul 16, 2019·5 cites·20 claims
- 0492US10164050B2Structure and formation method of semiconductor device structure with gate stackTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 25, 2018·7 cites·20 claims
- 0590US9991385B2Enhanced volume control by recess profile controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 5, 2018·8 cites·20 claims
- 0688US9627512B2Field effect transistor with non-doped channelTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Apr 18, 2017·5 cites·19 claims
- 0787US9799771B2FinFET and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 24, 2017·5 cites·20 claims
- 0886US11854851B2Interface toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·1 cites·19 claims
- 0984US7117058B2Automatic statistical process control (SPC) chart generation apparatus and method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 3, 2006·55 cites·24 claims
- 1083US10367079B2Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jul 30, 2019·2 cites·20 claims
- 1182US9929254B2Method of manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 27, 2018·2 cites·20 claims
- 1281US9559207B2Semiconductor device having epitaxy structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 31, 2017·2 cites·20 claims
- 1380US10818794B2Semiconductor structure and fabricating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 27, 2020·1 cites·20 claims
- 1479US11723152B2Oxygen and humidity control in storage deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 8, 2023·1 cites·19 claims
- 1576US12193164B2Oxygen and humidity control in storage deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 1676US9646871B2Semiconductor structure with shallow trench isolation and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 9, 2017·4 cites·13 claims
- 1775US2025357219A1Gas control in semiconductor processingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1874US11594534B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 28, 2023·0 cites·20 claims
- 1974US11342458B2Semiconductor structure and fabricating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 24, 2022·0 cites·20 claims
- 2073US11721746B2Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 8, 2023·0 cites·20 claims
- 2173US10879399B2Method of manufacturing semiconductor device comprising doped gate spacerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·1 cites·20 claims
- 2273US2025081356A1Oxygen and humidity control in storage deviceSEMICONDUCTOR MFG CO LID·Filed 2024·Application pending·0 cites
- 2372US2024087935A1Interface toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2469US11631748B2Structure and formation method of semiconductor device structure with gate stackTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 2569US10497701B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 3, 2019·1 cites·20 claims
- 2667US10749014B2Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 18, 2020·0 cites·20 claims
- 2765US10770569B2Semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 2865US6444587B1Plasma etch method incorporating inert gas purgeTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Sep 3, 2002·10 cites·8 claims
- 2964US11004845B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 3062US10636788B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 28, 2020·0 cites·20 claims
- 3162US10319842B2Method of manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 11, 2019·0 cites·20 claims
- 3262US10084060B2Semiconductor structure and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 25, 2018·1 cites·19 claims
- 3362US10068982B2Structure and formation method of semiconductor device structure with metal gateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 4, 2018·1 cites·20 claims
- 3462US7254513B2Fault detection and classification (FDC) specification management apparatus and method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 7, 2007·11 cites·18 claims
- 3561US9812577B2Semiconductor structure and fabricating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 7, 2017·0 cites·20 claims
- 3658US2022367292A1Gas Control in Semiconductor ProcessingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 3756US9978648B2Manufacturing method of semiconductor device with regrown undoped channel and regrown S/D regionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 22, 2018·0 cites·20 claims
- 3850US11018259B2Semiconductor device comprising gate structure and doped gate spacerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 25, 2021·0 cites·20 claims
- 3950US6980876B2Temperature-sensing wafer position detection system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 27, 2005·6 cites·20 claims
- 4049US9559165B2Semiconductor structure with strained source and drain structures and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 31, 2017·0 cites·20 claims
- 4147US11995065B2Database anomaly detectionSTRIPE INC·Filed 2021·Granted May 28, 2024·0 cites·18 claims
- 4244US2008002832A1Methods of detecting an abnormal operation of processing apparatus and systems thereofTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 4343US6920891B2Exhaust adaptor and method for chamber de-gassingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 26, 2005·4 cites·19 claims
- 4441US2005283498A1System and method to build, retrieve and track information in a knowledge database for trouble shooting purposesTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 4540US6595370B2Apparatus and method for reducing contamination in a wafer transfer chamberTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Jul 22, 2003·1 cites·20 claims
- 4639US9882013B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 30, 2018·0 cites·19 claims
- 4736US6778875B2Noise filter for backside helium signalTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·2 cites·5 claims
- 4836US2005004780A1Virtual assistant for semiconductor tool maintenanceTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 4929US2004002299A1Ventilation system and method of usingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
- 5027US6733617B2Direct detection of dielectric etch system magnet driver and coil malfunctionsTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted May 11, 2004·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →