Inventor · disambiguated record
Gerardus Johannes Joseph Keijsers
Also filed as: KEIJSERS GERARDUS J J · KEIJSERS GERARDUS JOHANNES JOS · KEIJSERS GERARDUS JOHANNES JOSEPH
6 granted patents·1 pending application·41 citations·filing 2001–2010
80Inventor score
Top patents by PatentIndex Score
7 records- 0177US7420676B2Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 2, 2008·19 cites·25 claims
- 0270US6583858B2Substrate holder for lithographic apparatusASML NETHERLANDS BV·Filed 2001·Granted Jun 24, 2003·15 cites·14 claims
- 0365US8610878B2Lithographic apparatus and methodBASELMANS JOHANNES JACOBUS MATHEUS·Filed 2010·Granted Dec 17, 2013·2 cites·20 claims
- 0463US7570342B2Radiation exposure apparatus comprising a gas flushing systemASML NETHERLANDS BV·Filed 2005·Granted Aug 4, 2009·2 cites·9 claims
- 0555US7675606B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Granted Mar 9, 2010·1 cites·30 claims
- 0648US7253077B2Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage mediumASML NETHERLANDS BV·Filed 2003·Granted Aug 7, 2007·2 cites·12 claims
- 0743US2009075012A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
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