Inventor · disambiguated record
Andreas Ariens
Also filed as: ARIENS ANDREAS B G
4 granted patents·79 citations·filing 2000–2004
79Inventor score
Technology areasH10P
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0182US6498350B2Crash prevention in positioning apparatus for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Dec 24, 2002·32 cites·16 claims
- 0273US7397940B2Object positioning method for a lithographic projection apparatusASML NETHERLANDS BV·Filed 2001·Granted Jul 8, 2008·20 cites·14 claims
- 0373US6875992B2Position measuring device, position measuring system, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 5, 2005·15 cites·20 claims
- 0468US6894261B2Position measuring system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2000·Granted May 17, 2005·12 cites·23 claims
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