Inventor · disambiguated record
Thomas Josephus Maria Castenmiller
Also filed as: CASTENMILLER THOMAS J M · CASTENMILLER THOMAS JOSEPHUS M · CASTENMILLER THOMAS JOSEPHUS MARIA
14 granted patents·2 pending applications·380 citations·filing 1997–2016
94Inventor score
Top patents by PatentIndex Score
16 records- 0196US6674510B1Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jan 6, 2004·192 cites·95 claims
- 0290US6563564B2Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Granted May 13, 2003·58 cites·22 claims
- 0387US7525638B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Apr 28, 2009·9 cites·11 claims
- 0484US7019815B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Mar 28, 2006·19 cites·11 claims
- 0581US7655367B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Feb 2, 2010·5 cites·14 claims
- 0680US7564536B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 21, 2009·7 cites·47 claims
- 0778US7595863B2Lithographic apparatus, excimer laser and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 29, 2009·5 cites·21 claims
- 0873US7397940B2Object positioning method for a lithographic projection apparatusASML NETHERLANDS BV·Filed 2001·Granted Jul 8, 2008·20 cites·14 claims
- 0973US6875992B2Position measuring device, position measuring system, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 5, 2005·15 cites·20 claims
- 1072US7675607B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 9, 2010·3 cites·23 claims
- 1168US7012672B2Lithographic apparatus, system, method, computer program, and apparatus for height map analysisASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·20 cites·36 claims
- 1268US6894261B2Position measuring system for use in lithographic apparatusASML NETHERLANDS BV·Filed 2000·Granted May 17, 2005·12 cites·23 claims
- 1363US6856376B2Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Feb 15, 2005·7 cites·23 claims
- 1458US2010091260A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1550US2016349628A1Rotatable frame, lithographic apparatus, projection system, method for focusing radiation and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
- 1648US6058281AScan module for a document copying machineOCE TECH BV·Filed 1997·Granted May 2, 2000·8 cites·28 claims
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