Inventor · disambiguated record
Toshio Komemura
Also filed as: KOMEMURA TOSHIO
8 granted patents·1 pending application·203 citations·filing 1986–2004
89Inventor score
Top patents by PatentIndex Score
9 records- 0187US6054016AMagnetically enhanced microwave plasma generating apparatusMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 25, 2000·61 cites·9 claims
- 0284US6109208APlasma generating apparatus with multiple microwave introducing meansMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Aug 29, 2000·50 cites·8 claims
- 0383US6929712B2Plasma processing apparatus capable of evaluating process performanceRENESAS TECH CORP·Filed 2002·Granted Aug 16, 2005·24 cites·7 claims
- 0472US6768542B2Defect inspecting device for substrate to be processed and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Jul 27, 2004·18 cites·11 claims
- 0570US6347655B1Die bonding device and semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Feb 19, 2002·20 cites·19 claims
- 0662US6648128B2Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Nov 18, 2003·8 cites·5 claims
- 0750US4775085ASemiconductor wafer breaking apparatusMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Oct 4, 1988·18 cites·4 claims
- 0837US2005024630A1Device for examining end partRENESAS TECH CORP·Filed 2004·Application pending·0 cites
- 0933US5679204APlasma apparatusSHIKOKU INSTRUMENTATION CO LTD·Filed 1996·Granted Oct 21, 1997·4 cites·9 claims
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