Inventor · disambiguated record
Toshihiko Noguchi
Also filed as: NOGUCHI TOSHIHIKO
6 granted patents·320 citations·filing 1991–2002
86Inventor score
Top patents by PatentIndex Score
6 records- 0194US5534073ASemiconductor producing apparatus comprising wafer vacuum chucking deviceMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jul 9, 1996·213 cites·9 claims
- 0283US6929712B2Plasma processing apparatus capable of evaluating process performanceRENESAS TECH CORP·Filed 2002·Granted Aug 16, 2005·24 cites·7 claims
- 0378US5976260ASemiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatusMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Nov 2, 1999·48 cites·14 claims
- 0472US6768542B2Defect inspecting device for substrate to be processed and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Jul 27, 2004·18 cites·11 claims
- 0562US6648128B2Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Nov 18, 2003·8 cites·5 claims
- 0637US5196034ASemiconductor wafer cleaning apparatusMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Mar 23, 1993·9 cites·5 claims
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