Inventor · disambiguated record
Kai-Hsin Liu
Also filed as: LIU KAI-HSIN
2 granted patents·5 citations·filing 2002–2004
46Inventor score
Technology areasC23C
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0154US6860138B1Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·5 cites·20 claims
- 0241US7029928B2Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamberTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 18, 2006·0 cites·14 claims
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