Inventor · disambiguated record
Hsi-Wen Liao
Also filed as: LIAO HSI-WEN
3 granted patents·9 citations·filing 2002–2004
61Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0154US6860138B1Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·5 cites·20 claims
- 0244US6727994B2Z-axis monitoring apparatus for robot bladeTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 27, 2004·4 cites·20 claims
- 0341US7029928B2Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamberTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 18, 2006·0 cites·14 claims
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