Inventor · disambiguated record
Satoru Sagoh
Also filed as: SAGOH SATORU
4 granted patents·65 citations·filing 1996–1998
78Inventor score
Technology areasH01J
Files withFUJITSU LTD4
Top patents by PatentIndex Score
4 records- 0175US6090527AElectron beam exposure mask and method of manufacturing the same and electron beam exposure methodFUJITSU LTD·Filed 1998·Granted Jul 18, 2000·25 cites·9 claims
- 0274US5849437AElectron beam exposure mask and method of manufacturing the same and electron beam exposure methodFUJITSU LTD·Filed 1996·Granted Dec 15, 1998·24 cites·19 claims
- 0355US5952155AMask and method of creating mask as well as electron-beam exposure method and electron-beam exposure deviceFUJITSU LTD·Filed 1998·Granted Sep 14, 1999·10 cites·37 claims
- 0446US5824437AMask and method of creating mask as well as electron-beam exposure method and electron-beam exposure deviceFUJITSU LTD·Filed 1996·Granted Oct 20, 1998·6 cites·30 claims
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