Inventor · disambiguated record
Evelio Sevillano
Also filed as: SEVILLANO EVELIO
8 granted patents·587 citations·filing 1993–2018
87Inventor score
Top patents by PatentIndex Score
8 records- 0198US5501740AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1994·Granted Mar 26, 1996·483 cites·41 claims
- 0287US5556475AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Sep 17, 1996·52 cites·39 claims
- 0378US10651097B2Using identifiers to map edge ring part numbers onto slot numbersLAM RES CORP·Filed 2018·Granted May 12, 2020·3 cites·21 claims
- 0466US5405645AHigh growth rate plasma diamond deposition process and method of controlling sameAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Apr 11, 1995·27 cites·9 claims
- 0564US8900470B2Differential measurements for endpoint signal enhancementLAM RES CORP·Filed 2012·Granted Dec 2, 2014·1 cites·20 claims
- 0656US5518759AHigh growth rate plasma diamond deposition process and method of controlling sameAPPLIED SCIENCE & TECH INC·Filed 1995·Granted May 21, 1996·21 cites·16 claims
- 0752US9543225B2Systems and methods for detecting endpoint for through-silicon via reveal applicationsLAM RES CORP·Filed 2014·Granted Jan 10, 2017·0 cites·17 claims
- 0849US9941178B2Methods for detecting endpoint for through-silicon via reveal applicationsLAM RES CORP·Filed 2016·Granted Apr 10, 2018·0 cites·16 claims
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