Inventor · disambiguated record
Hatsuo Nakamura
Also filed as: NAKAMURA HATSUO
4 granted patents·144 citations·filing 1983–1991
78Inventor score
Top patents by PatentIndex Score
4 records- 0189US4610079AMethod of dicing a semiconductor waferTOKYO SHIBAURA ELECTRIC CO·Filed 1985·Granted Sep 9, 1986·111 cites·3 claims
- 0262US5305222APattern forming systemTOSHIBA KK·Filed 1991·Granted Apr 19, 1994·20 cites·5 claims
- 0342US4525523ANegative-working photoresist coating compositionKANTO KAGAKU·Filed 1983·Granted Jun 25, 1985·7 cites·8 claims
- 0433US4461825AMethod for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Jul 24, 1984·6 cites·14 claims
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