Inventor · disambiguated record
Rui Kanemura
Also filed as: KANEMURA RUI
5 granted patents·3 pending applications·1 citations·filing 2019–2023
60Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0169US11101131B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 24, 2021·1 cites·11 claims
- 0251US11251034B2Film forming method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 15, 2022·0 cites·6 claims
- 0351US2024234162A9Substrate-processing method and substrate-processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0448US11114297B2Method for forming semiconductor film and film forming deviceTOKYO ELECTRON LTD·Filed 2019·Granted Sep 7, 2021·0 cites·10 claims
- 0547US11658028B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 23, 2023·0 cites·12 claims
- 0642US2020312677A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0741US11807938B2Exhaust device, processing system, and processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 7, 2023·0 cites·7 claims
- 0841US2020308696A1Film Forming Method and Film Forming ApparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →