Inventor · disambiguated record
Shojiro Yahata
Also filed as: YAHATA SHOJIRO
4 granted patents·1 pending application·4 citations·filing 2009–2023
60Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0185US11032899B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 8, 2021·4 cites·9 claims
- 0268US11825589B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Nov 21, 2023·0 cites·22 claims
- 0355US2023268164A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0454US8052364B2Coupling member and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Nov 8, 2011·0 cites·12 claims
- 0548US11961718B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Apr 16, 2024·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →