Inventor · disambiguated record
Ruairidh Maccrimmon
Also filed as: MACCRIMMON RUAIRIDH
8 granted patents·1 pending application·27 citations·filing 2007–2021
82Inventor score
Top patents by PatentIndex Score
9 records- 0182US8512586B2Gas cluster ion beam etching process for achieving target etch process metrics for multiple materialsTABAT MARTIN D·Filed 2011·Granted Aug 20, 2013·5 cites·20 claims
- 0277US7564024B2Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpiecesTEL EPION INC·Filed 2007·Granted Jul 21, 2009·11 cites·23 claims
- 0375US8293126B2Method and system for multi-pass correction of substrate defectsMACCRIMMON RUAIRIDH·Filed 2007·Granted Oct 23, 2012·6 cites·18 claims
- 0469US8513138B2Gas cluster ion beam etching process for Si-containing and Ge-containing materialsSHAO YAN·Filed 2011·Granted Aug 20, 2013·3 cites·11 claims
- 0565US9324567B2Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materialsTEL EPION INC·Filed 2013·Granted Apr 26, 2016·1 cites·23 claims
- 0660US8298432B2Method and system for adjusting beam dimension for high-gradient location specific processingMACCRIMMON RUAIRIDH·Filed 2007·Granted Oct 30, 2012·1 cites·18 claims
- 0752US2013309872A1Gas cluster ion beam etching process for achieving target etch process metrics for multiple materialsTEL EPION INC·Filed 2013·Application pending·0 cites
- 0838US12018672B2Precision volumetric pump with a bellows hermetic sealIDEX HEALTH AND SCIENCE LLC·Filed 2021·Granted Jun 25, 2024·0 cites·24 claims
- 0937US8557710B2Gas cluster ion beam etching process for metal-containing materialsSHAO YAN·Filed 2011·Granted Oct 15, 2013·0 cites·6 claims
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