Inventor · disambiguated record
Chun-Kung Chen
Also filed as: CHEN CHUN · CHEN CHUN-KUNG
2 granted patents·1 pending application·11 citations·filing 2004–2024
49Inventor score
Top patents by PatentIndex Score
3 records- 0168US7501226B2Immersion lithography system with wafer sealing mechanismsTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 10, 2009·11 cites·22 claims
- 0260US2025239561A1Semiconductor package and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0344US7723014B2System and method for photolithography in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted May 25, 2010·0 cites·6 claims
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