Inventor · disambiguated record
Linda (Tong) Jiang
Also filed as: JIANG LINDA · JIANG LINDA TONG
6 granted patents·1 pending application·110 citations·filing 1998–2013
84Inventor score
Top patents by PatentIndex Score
7 records- 0186US8327861B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2006·Granted Dec 11, 2012·15 cites·15 claims
- 0282US7578889B2Methodology for cleaning of surface metal contamination from electrode assembliesLAM RES CORP·Filed 2007·Granted Aug 25, 2009·9 cites·18 claims
- 0381US6896586B2Method and apparatus for heating polishing padLAM RES CORP·Filed 2002·Granted May 24, 2005·26 cites·16 claims
- 0475US6319330B1Method and apparatus for cleaning low K dielectric and metal wafer surfacesLAM RES CORP·Filed 2000·Granted Nov 20, 2001·16 cites·10 claims
- 0575US6277203B1Method and apparatus for cleaning low K dielectric and metal wafer surfacesLAM RES CORP·Filed 1998·Granted Aug 21, 2001·43 cites·10 claims
- 0661US8607806B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2012·Granted Dec 17, 2013·1 cites·10 claims
- 0751US2014053884A1Megasonic Precision Cleaning Of Semiconductor Process Equipment Components And PartsLAM RES CORP·Filed 2013·Application pending·0 cites
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