Inventor · disambiguated record
Tyng-Hao Hsu
Also filed as: HSU TYNG-HAO
6 granted patents·80 citations·filing 1998–2004
82Inventor score
Top patents by PatentIndex Score
6 records- 0181US7162071B2Progressive self-learning defect review and classification methodTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 9, 2007·39 cites·16 claims
- 0280US6721939B2Electron beam shot linearity monitoringTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 13, 2004·15 cites·20 claims
- 0361US7035449B2Method for applying a defect finder mark to a backend photomask making processTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Apr 25, 2006·7 cites·17 claims
- 0453US6127075AMethod for checking accuracy of a measuring instrument for overlay registrationMOSEL VITELIC INC·Filed 1998·Granted Oct 3, 2000·16 cites·11 claims
- 0546US6858353B2Increased-contrast film for high-transmittance attenuated phase-shaft masksTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 22, 2005·1 cites·13 claims
- 0643US7469057B2System and method for inspecting errors on a waferTAIWAN SEMICONDUCTOR MFG CORP·Filed 2004·Granted Dec 23, 2008·2 cites·20 claims
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