Inventor · disambiguated record
Yu Nunoshige
Also filed as: NUNOSHIGE YU
9 granted patents·1 pending application·366 citations·filing 2014–2020
81Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0196US9644266B2Film forming apparatus, gas supply device and film forming methodTOKYO ELECTRON LTD·Filed 2014·Granted May 9, 2017·364 cites·5 claims
- 0279US10767262B2Gas supply apparatus and gas supply methodTOKYO ELECTRON LTD·Filed 2017·Granted Sep 8, 2020·1 cites·5 claims
- 0368US11578408B2Gas processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Feb 14, 2023·1 cites·10 claims
- 0453US12009217B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 11, 2024·0 cites·8 claims
- 0545US11732357B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 22, 2023·0 cites·17 claims
- 0644US10340176B2Substrate mounting method and substrate mounting deviceTOKYO ELECTRON LTD·Filed 2017·Granted Jul 2, 2019·0 cites·8 claims
- 0741US11499225B2Gas processing apparatus and gas processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 15, 2022·0 cites·8 claims
- 0840US11248293B2Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 15, 2022·0 cites·6 claims
- 0939US10864548B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 15, 2020·0 cites·13 claims
- 1035US2020048764A1Film Forming Apparatus and Film Forming MethodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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