Inventor · disambiguated record
Markus Deufel
Also filed as: DEUFEL MARKUS
3 granted patents·1 pending application·11 citations·filing 2015–2019
56Inventor score
Files withAIXTRON SE4
Top patents by PatentIndex Score
4 records- 0185US10329668B2Device and method for exhaust gas treatment on CVD reactorAIXTRON SE·Filed 2015·Granted Jun 25, 2019·11 cites·4 claims
- 0250US11286566B2Apparatus for deposition of a III-V semiconductor layerAIXTRON SE·Filed 2019·Granted Mar 29, 2022·0 cites·9 claims
- 0343US10883171B2CVD reactor and method for cleaning a CVD reactorAIXTRON SE·Filed 2017·Granted Jan 5, 2021·0 cites·12 claims
- 0441US2016225619A1Method and apparatus for deposition of a iii-v semiconductor layerAIXTRON SE·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →