Inventor · disambiguated record
Esther Jeng
Also filed as: JENG ESTHER
11 granted patents·6 pending applications·247 citations·filing 2012–2024
92Inventor score
Top patents by PatentIndex Score
17 records- 0198US10103058B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2017·Granted Oct 16, 2018·23 cites·13 claims
- 0298US9653353B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2013·Granted May 16, 2017·50 cites·16 claims
- 0398US9240347B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2014·Granted Jan 19, 2016·72 cites·20 claims
- 0497US11901227B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2021·Granted Feb 13, 2024·3 cites·18 claims
- 0597US9997405B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2015·Granted Jun 12, 2018·22 cites·19 claims
- 0696US11075115B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2018·Granted Jul 27, 2021·11 cites·22 claims
- 0796US10580695B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2018·Granted Mar 3, 2020·13 cites·13 claims
- 0896US10256142B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 9, 2019·25 cites·23 claims
- 0991US8883637B2Systems and methods for controlling etch selectivity of various materialsJENG ESTHER·Filed 2012·Granted Nov 11, 2014·23 cites·16 claims
- 1090US11410883B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2019·Granted Aug 9, 2022·5 cites·19 claims
- 1174US2021327754A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2021·Application pending·0 cites
- 1266US2020185273A1Feature fill with nucleation inhibitionLAM RES CORP·Filed 2020·Application pending·0 cites
- 1364US12444651B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2022·Granted Oct 14, 2025·0 cites·7 claims
- 1464US2025149383A1Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2024·Application pending·0 cites
- 1555US2016190008A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2015·Application pending·0 cites
- 1650US2025226227A1Deposition of metal-containing films and chamber cleanLAM RES CORP·Filed 2023·Application pending·0 cites
- 1750US2025051908A1Large grain tungsten growth in featuresLAM RES CORP·Filed 2022·Application pending·0 cites
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