Inventor · disambiguated record
Christopher E. Obszarny
Also filed as: OBSZARNY CHRISTOPHER E
6 granted patents·1 pending application·144 citations·filing 1997–2007
85Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0186US7810033B2Methods and systems involving text analysisIBM·Filed 2007·Granted Oct 5, 2010·20 cites·13 claims
- 0285US6429667B1Electrically testable process window monitor for lithographic processingIBM·Filed 2000·Granted Aug 6, 2002·35 cites·24 claims
- 0379US6163367AApparatus and method for in-situ adjustment of light transmission in a photolithography processIBM·Filed 1998·Granted Dec 19, 2000·46 cites·11 claims
- 0467US5905019AThin resist process by sub-threshold exposureIBM·Filed 1997·Granted May 18, 1999·31 cites·26 claims
- 0560US2005273372A1Integrated system for scheduling meetings and resourcesIBM·Filed 2004·Application pending·0 cites
- 0655US6176967B1Reactive ion etch chamber wafer masking systemIBM·Filed 1998·Granted Jan 23, 2001·12 cites·7 claims
- 0727US6127686AThin resist process by sub-threshold exposureIBM·Filed 1999·Granted Oct 3, 2000·0 cites·12 claims
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