Inventor · disambiguated record
Paul Van Der Veen
Also filed as: VAN DER VEEN PAUL
25 granted patents·179 citations·filing 1999–2017
95Inventor score
Top patents by PatentIndex Score
25 records- 0188US6583855B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Jun 24, 2003·41 cites·25 claims
- 0284US6538716B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Mar 25, 2003·24 cites·23 claims
- 0382US8432529B2Lithographic apparatus and monitoring methodCLAESSENS BERT JAN·Filed 2010·Granted Apr 30, 2013·4 cites·17 claims
- 0476US9645510B2Method of controlling a radiation source and lithographic apparatus comprising the radiation sourceASML NETHERLANDS BV·Filed 2014·Granted May 9, 2017·3 cites·20 claims
- 0576US9140999B2Reticle assembly, a lithographic apparatus, the use in a lithographic process, and a method to project two or more image fields in a single scanning movement of a lithographic processVAN DER VEEN PAUL·Filed 2012·Granted Sep 22, 2015·5 cites·12 claims
- 0676US6455862B1Lithographic projection apparatusASML NETHERLANDS BV·Filed 1999·Granted Sep 24, 2002·51 cites·12 claims
- 0775US7368732B2Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer programASML NETHERLANDS BV·Filed 2005·Granted May 6, 2008·4 cites·25 claims
- 0872US8937706B2Lithographic apparatus and methodMULDER HEINE MELLE·Filed 2007·Granted Jan 20, 2015·3 cites·24 claims
- 0970US6733165B2Optical integrator for an illumination deviceZEISS CARL SEMICONDUCTOR MFG·Filed 2001·Granted May 11, 2004·13 cites·42 claims
- 1068US8885144B2Illumination system and lithographic apparatusCLAESSENS BERT JAN·Filed 2011·Granted Nov 11, 2014·2 cites·20 claims
- 1162US8004770B2Pulse modifier with adjustable etendueASML HOLDING NV·Filed 2009·Granted Aug 23, 2011·1 cites·10 claims
- 1261US10222703B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted Mar 5, 2019·0 cites·20 claims
- 1361US6989544B2Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer programASML NETHERLANDS BV·Filed 2002·Granted Jan 24, 2006·6 cites·13 claims
- 1460US7476491B2Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 13, 2009·6 cites·10 claims
- 1558US8982319B2Lithographic apparatus and methodSTOLK ROLAND PIETER·Filed 2011·Granted Mar 17, 2015·1 cites·20 claims
- 1658US7012265B2Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Mar 14, 2006·6 cites·13 claims
- 1757US9778575B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Oct 3, 2017·0 cites·22 claims
- 1857US7508487B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 24, 2009·5 cites·55 claims
- 1957US6700646B2Lithographic apparatus, method of manufacturing a device, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Mar 2, 2004·4 cites·24 claims
- 2053US9250536B2Lithographic apparatus and methodMULDER HEINE MELLE·Filed 2008·Granted Feb 2, 2016·0 cites·23 claims
- 2142US8625199B2Pulse modifier with adjustable etendueJOOBEUR ADEL·Filed 2011·Granted Jan 7, 2014·0 cites·16 claims
- 2240US7315351B2Lithographic apparatus, device manufacturing method and device manufactured therewithASML NETHERLANDS BV·Filed 2004·Granted Jan 1, 2008·0 cites·26 claims
- 2339US7297911B2Lithographic apparatus, illumination system, illumination controller and control methodASML NETHERLANDS BV·Filed 2005·Granted Nov 20, 2007·0 cites·15 claims
- 2438US7283208B2Lithographic apparatus, method of manufacturing a device, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Oct 16, 2007·0 cites·32 claims
- 2538US6473163B2Fluorescence radiation filterASML NETHERLANDS BV·Filed 2000·Granted Oct 29, 2002·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →