Inventor · disambiguated record
Dong-Kyun Choi
Also filed as: CHOI DONG-KYUN
5 granted patents·1 pending application·42 citations·filing 2001–2005
77Inventor score
Top patents by PatentIndex Score
6 records- 0181US6313047B2MOCVD method of tantalum oxide filmTOKYO ELECTRON LTD·Filed 2001·Granted Nov 6, 2001·27 cites·22 claims
- 0254US7041546B2Film forming method for depositing a plurality of high-k dielectric filmsTOKYO ELECTRON LTD·Filed 2003·Granted May 9, 2006·5 cites·4 claims
- 0353US7368384B2Film formation apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2005·Granted May 6, 2008·4 cites·13 claims
- 0452US7084023B2Method of manufacturing semiconductor device, film-forming apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2004·Granted Aug 1, 2006·5 cites·6 claims
- 0551US7546840B2Method for cleaning reaction container and film deposition systemTOKYO ELECTRON LTD·Filed 2002·Granted Jun 16, 2009·1 cites·1 claims
- 0633US2006216953A1Method of forming film and film forming apparatusNAKAJIMA SHIGERU·Filed 2004·Application pending·0 cites
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