Inventor · disambiguated record
Rui Kato
Also filed as: KATO RUI
5 granted patents·1 pending application·4 citations·filing 2012–2018
64Inventor score
Files withSHIMADZU CORP6
Top patents by PatentIndex Score
6 records- 0176US10288561B1Gas analyzerSHIMADZU CORP·Filed 2018·Granted May 14, 2019·2 cites·4 claims
- 0263US9228828B2Thickness monitoring device, etching depth monitoring device and thickness monitoring methodSHIMADZU CORP·Filed 2013·Granted Jan 5, 2016·2 cites·12 claims
- 0342US9007599B2Depth of hole measurement by subtracting area of two spectra separated by timeSHIMADZU CORP·Filed 2013·Granted Apr 14, 2015·0 cites·2 claims
- 0439US9460973B2Surface processing progress monitoring systemSHIMADZU CORP·Filed 2014·Granted Oct 4, 2016·0 cites·7 claims
- 0538US9001337B2Etching monitor deviceSHIMADZU CORP·Filed 2013·Granted Apr 7, 2015·0 cites·4 claims
- 0637US2013169958A1Surface Processing Progress Monitoring SystemSHIMADZU CORP·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →