Inventor · disambiguated record
Chiyan Kuan
Also filed as: KUAN CHIYAN
21 granted patents·2 pending applications·70 citations·filing 2005–2025
93Inventor score
Files withHERMES MICROVISION INC10ASML NETHERLANDS BV6KUAN CHIYAN4KKT HOLDINGS SYNDICATE1KLA TENCOR TECHNOLOGIES INC1
Top patents by PatentIndex Score
23 records- 0197US9436985B1Method and system for enhancing image qualityHERMES MICROVISION INC·Filed 2015·Granted Sep 6, 2016·14 cites·26 claims
- 0292US8575573B2Structure for discharging extreme ultraviolet maskWANG YOU-JIN·Filed 2011·Granted Nov 5, 2013·14 cites·7 claims
- 0391US9002097B1Method and system for enhancing image qualityHERMES MICROVISION INC·Filed 2013·Granted Apr 7, 2015·6 cites·7 claims
- 0490US9113538B2Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet maskHERMES MICROVISION INC·Filed 2013·Granted Aug 18, 2015·9 cites·6 claims
- 0587US10054556B2Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet maskHERMES MICROVISION INC·Filed 2016·Granted Aug 21, 2018·3 cites·17 claims
- 0686US10088438B2Method and system for inspecting an EUV maskHERMES MICROVISION INC·Filed 2016·Granted Oct 2, 2018·2 cites·13 claims
- 0784US10775325B2Method and system for inspecting an EUV maskASML NETHERLANDS BV·Filed 2018·Granted Sep 15, 2020·2 cites·9 claims
- 0880US9572237B2Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet maskHERMES MICROVISION INC·Filed 2015·Granted Feb 14, 2017·2 cites·17 claims
- 0976US8295580B2Substrate and die defect inspection methodKUAN CHIYAN·Filed 2009·Granted Oct 23, 2012·5 cites·20 claims
- 1073US9164399B2Reticle operation systemHERMES MICROVISION INC·Filed 2013·Granted Oct 20, 2015·2 cites·7 claims
- 1173US8217349B2Method for inspecting EUV reticle and apparatus thereofKUAN CHIYAN·Filed 2010·Granted Jul 10, 2012·3 cites·9 claims
- 1272US11662323B2Method and system for inspecting an EUV maskASML NETHERLANDS BV·Filed 2020·Granted May 30, 2023·0 cites·15 claims
- 1372US2025226175A1Dynamic determination of a sample inspection recipe of charged particle beam inspectionASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1470US9485846B2Method and system for inspecting an EUV maskHERMES MICROVISION INC·Filed 2014·Granted Nov 1, 2016·1 cites·4 claims
- 1569US7115866B1Site stepping for electron beam micro analysisKLA TENCOR TECHNOLOGIES INC·Filed 2005·Granted Oct 3, 2006·4 cites·20 claims
- 1666US12142451B2System for inspecting and grounding a mask in a charged particle systemASML NETHERLANDS BV·Filed 2020·Granted Nov 12, 2024·0 cites·22 claims
- 1765US9859089B2Method and system for inspecting and grounding an EUV maskHERMES MICROVISION INC·Filed 2015·Granted Jan 2, 2018·1 cites·7 claims
- 1865US9177758B2Charged particle beam apparatusHERMES MICROVISION INC·Filed 2014·Granted Nov 3, 2015·1 cites·23 claims
- 1963US8692193B2Method for inspecting EUV reticle and apparatus thereofKUAN CHIYAN·Filed 2012·Granted Apr 8, 2014·1 cites·32 claims
- 2056US11448607B2Charged particle beam inspection of ungrounded samplesASML NETHERLANDS BV·Filed 2017·Granted Sep 20, 2022·0 cites·15 claims
- 2153US2020286710A1Dynamic determination of a sample inspection recipe of charged particle beam inspectionASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 2250US8519333B2Charged particle system for reticle/wafer defects inspection and reviewKUAN CHIYAN·Filed 2012·Granted Aug 27, 2013·0 cites·22 claims
- 2349US11366153B2Micro LED display panelKKT HOLDINGS SYNDICATE·Filed 2020·Granted Jun 21, 2022·0 cites·8 claims
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