Inventor · disambiguated record
Kazuo Terada
Also filed as: TERADA KAZUO
18 granted patents·1 pending application·779 citations·filing 1986–2010
95Inventor score
Top patents by PatentIndex Score
19 records- 0197US5616264AMethod and apparatus for controlling temperature in rapid heat treatment systemTOKYO ELECTRON LTD·Filed 1994·Granted Apr 1, 1997·565 cites·16 claims
- 0282US8434423B2Substrate carrying apparatus having circumferential sidewall and substrate processing systemTOSHIMA TAKAYUKI·Filed 2010·Granted May 7, 2013·6 cites·6 claims
- 0376US7871265B2Heat treatment deviceTOKYO ELECTRON LTD·Filed 2007·Granted Jan 18, 2011·5 cites·18 claims
- 0473US8235061B2Substrate processing apparatus and substrate processing methodTOSHIMA TAKAYUKI·Filed 2010·Granted Aug 7, 2012·3 cites·15 claims
- 0573US5324540ASystem and method for supporting and rotating substrates in a process chamberTOKYO ELECTRON LTD·Filed 1993·Granted Jun 28, 1994·52 cites·11 claims
- 0671US6048767AMethod of forming a semiconductor memory deviceNEC CORP·Filed 1997·Granted Apr 11, 2000·24 cites·9 claims
- 0770US5334257ATreatment object supporting deviceTOKYO ELECTRON LTD·Filed 1993·Granted Aug 2, 1994·46 cites·11 claims
- 0869US8933376B2Heating device, coating and developing system, heating method and storage mediumFUKUOKA TETSUO·Filed 2008·Granted Jan 13, 2015·3 cites·23 claims
- 0967US9076643B2Supercritical processing apparatus, substrate processing system and supercritical processing methodTOSHIMA TAKAYUKI·Filed 2010·Granted Jul 7, 2015·2 cites·8 claims
- 1064US8217313B2Heating apparatus and heating methodFUKUOKA TETSUO·Filed 2008·Granted Jul 10, 2012·2 cites·6 claims
- 1161US5760452ASemiconductor memory and method of fabricating the sameNEC CORP·Filed 1996·Granted Jun 2, 1998·16 cites·9 claims
- 1257US6756087B2Method for removing organic compound by ultraviolet radiation and apparatus thereforIBM·Filed 2002·Granted Jun 29, 2004·4 cites·3 claims
- 1356US6468599B1Method for removing organic compound by ultraviolet radiationIBM·Filed 1999·Granted Oct 22, 2002·18 cites·11 claims
- 1454US5061412AProcess for producing a magnet of strontium ferrite having high performanceSUMITOMO SPEC METALS·Filed 1990·Granted Oct 29, 1991·14 cites·5 claims
- 1547US8006636B2Substrate treatment apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Aug 30, 2011·0 cites·7 claims
- 1646US2008182217A1Heating device, heating method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1744US6329663B1Method and apparatus for cleaning a glass substrate for a color filterIBM·Filed 1999·Granted Dec 11, 2001·10 cites·15 claims
- 1837US4706107AIC memory cells with reduced alpha particle influenceNIPPON ELECTRIC CO·Filed 1986·Granted Nov 10, 1987·6 cites·13 claims
- 1929US5053156AProcess for producing ferrite powder for ferrite magnetsSUMITOMO SPEC METALS·Filed 1990·Granted Oct 1, 1991·3 cites·11 claims
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