Inventor · disambiguated record
Junghwan Um
Also filed as: UM JUNGHWAN
3 granted patents·3 pending applications·6 citations·filing 2016–2024
56Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0181US10672629B2Ring assembly and chuck assembly having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jun 2, 2020·5 cites·23 claims
- 0262US10312059B2Ring member with air holes and substrate processing system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jun 4, 2019·1 cites·20 claims
- 0362US2025210322A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0456US2024071732A1Edge ring, dry etching apparatus having the same, and operation method of etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0546US2023110643A1Method of manufacturing integrated circuit using etching processSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0635US10892142B2System for fabricating a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 12, 2021·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →