Inventor · disambiguated record
Marcio Alexandre Cano Miranda
Also filed as: MIRANDA MARCIO ALEXANDRE CANO
19 granted patents·42 citations·filing 2007–2019
92Inventor score
Files withASML NETHERLANDS BV8BRUIJSTENS JEROEN PETER JOHANNES2NIENHUYS HAN-KWANG2PATEL HRISHIKESH2BERKVENS PAUL PETRUS JOANNES1
Top patents by PatentIndex Score
19 records- 0191US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0290US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0379US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
- 0476US8730447B2Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted May 20, 2014·3 cites·16 claims
- 0576US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 0668US9709901B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2014·Granted Jul 18, 2017·1 cites·20 claims
- 0767US9176371B2Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted Nov 3, 2015·2 cites·21 claims
- 0867US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 0965US10429741B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 1, 2019·0 cites·20 claims
- 1065US8928857B2Lithographic apparatus and method of operating the apparatusTHOMAS IVO ADAM JOHANNES·Filed 2010·Granted Jan 6, 2015·1 cites·20 claims
- 1161USRE49297ELithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 15, 2022·0 cites·23 claims
- 1260US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 1360US10146139B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2017·Granted Dec 4, 2018·0 cites·19 claims
- 1459US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 1557US10151984B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2015·Granted Dec 11, 2018·0 cites·21 claims
- 1655US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
- 1754US10191377B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 29, 2019·0 cites·21 claims
- 1847US9618858B2Lithographic apparatus and a device manufacturing method involving thermal conditioning of a tablePATEL HRISHIKESH·Filed 2011·Granted Apr 11, 2017·0 cites·21 claims
- 1944US8462313B2Lithographic apparatus and device manufacturing methodJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Jun 11, 2013·0 cites·23 claims
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