Inventor · disambiguated record
Siebe Landheer
Also filed as: LANDHEER SIEBE
15 granted patents·1 pending application·43 citations·filing 2001–2020
90Inventor score
Files withASML NETHERLANDS BV8BRUIJSTENS JEROEN PETER JOHANNES2VAN DE KERKHOF MARCUS ADRIANUS2BECKERS MARCEL1JANSSEN FRANCISCUS JOHANNES JOSEPH1
Top patents by PatentIndex Score
16 records- 0192US9182678B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2012·Granted Nov 10, 2015·6 cites·20 claims
- 0286US8233134B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2008·Granted Jul 31, 2012·6 cites·18 claims
- 0379US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
- 0476US8730447B2Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted May 20, 2014·3 cites·16 claims
- 0573US6825914B2System for flushing at least one internal space of an objectiveZEISS CARL SMT AG·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 0669US8462314B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Jun 11, 2013·3 cites·28 claims
- 0768US9709901B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2014·Granted Jul 18, 2017·1 cites·20 claims
- 0867US9176371B2Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structureBRUIJSTENS JEROEN PETER JOHANNES·Filed 2009·Granted Nov 3, 2015·2 cites·21 claims
- 0965US10429741B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 1, 2019·0 cites·20 claims
- 1065US8928857B2Lithographic apparatus and method of operating the apparatusTHOMAS IVO ADAM JOHANNES·Filed 2010·Granted Jan 6, 2015·1 cites·20 claims
- 1161US10088755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 2, 2018·0 cites·20 claims
- 1260US10146139B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2017·Granted Dec 4, 2018·0 cites·19 claims
- 1359US11774869B2Method and system for determining overlayASML NETHERLANDS BV·Filed 2020·Granted Oct 3, 2023·0 cites·14 claims
- 1457US10151984B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2015·Granted Dec 11, 2018·0 cites·21 claims
- 1557US9715179B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 25, 2017·0 cites·20 claims
- 1642US2013162964A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2012·Application pending·0 cites
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