Inventor · disambiguated record
Geunkyu Choi
Also filed as: CHOI GEUNKYU
5 granted patents·2 pending applications·423 citations·filing 2014–2021
77Inventor score
Top patents by PatentIndex Score
7 records- 0196US9362137B2Plasma treating apparatus, substrate treating method, and method of manufacturing a semiconductor deviceKANG SUNGHO·Filed 2015·Granted Jun 7, 2016·417 cites·19 claims
- 0269US9082611B2Methods of forming a layerCHUNG SUKJIN·Filed 2014·Granted Jul 14, 2015·4 cites·19 claims
- 0367US9951422B2Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensorsSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Apr 24, 2018·2 cites·16 claims
- 0453US12230514B2Substrate processing apparatus including filling gas supply line and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 0545US2016225586A1Plasma treating apparatus, substrate treating method, and method of manufacturing a semiconductor deviceKANG SUNGHO·Filed 2016·Application pending·0 cites
- 0643US10844491B2Gas supply unit and substrate processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 24, 2020·0 cites·20 claims
- 0731US2018135177A1Gas injection apparatus and substrate treating apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
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