Inventor · disambiguated record
Helmut Banzhof
Also filed as: BANZHOF HELMUT
10 granted patents·2 pending applications·88 citations·filing 2002–2011
87Inventor score
Technology areasH01J
Files withINTEGRATED CIRCUIT TESTING5BANZHOF HELMUT2ADAMEC PAVEL1ALMOGY GILAD1APPLIED MATERIALS ISRAEL LTD1
Top patents by PatentIndex Score
12 records- 0196US9153413B2Multi-beam scanning electron beam device and methods of using the sameALMOGY GILAD·Filed 2008·Granted Oct 6, 2015·57 cites·24 claims
- 0283US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 0379US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 0476US8049180B2Achromatic mass separatorINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 1, 2011·4 cites·23 claims
- 0571US8164067B2Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimenADAMEC PAVEL·Filed 2010·Granted Apr 24, 2012·3 cites·22 claims
- 0665US7838830B2Charged particle beam apparatus and method for operating a charged particle beam apparatusINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 23, 2010·1 cites·24 claims
- 0764US8294096B2Charged particle beam device and a method of operating a charged particle beam deviceBANZHOF HELMUT·Filed 2011·Granted Oct 23, 2012·2 cites·16 claims
- 0863US7763866B2Charged particle beam device with apertureINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Jul 27, 2010·5 cites·21 claims
- 0962US7282711B2Multiple electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 2002·Granted Oct 16, 2007·6 cites·35 claims
- 1051US2011163229A1High throughput sem toolAPPLIED MATERIALS ISRAEL LTD·Filed 2008·Application pending·0 cites
- 1149US8735847B2High resolution gas field ion column with reduced sample loadBANZHOF HELMUT·Filed 2008·Granted May 27, 2014·0 cites·9 claims
- 1248US2008073583A1Ion beam apparatus and method for aligning sameINTEGRATED CIRCUIT TESTING·Filed 2007·Application pending·0 cites
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