Inventor · disambiguated record

Ernesto L. Vargas

Also filed as: VARGAS ERNESTO L

1 granted patent·35 citations·filing 2005–2005

46Inventor score

Technology areasH05G

Files withCYMER INC1

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1 record

0187US7217941B2Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light sourceCYMER INC·Filed 2005·Granted May 15, 2007·35 cites·20 claims

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Ernesto L. Vargas — Patent Inventor | PatentIndex