Inventor · disambiguated record
Peter Schaap
Also filed as: SCHAAP PETER
4 granted patents·34 citations·filing 2005–2015
76Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0190US9983489B2Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiationASML NETHERLANDS BV·Filed 2015·Granted May 29, 2018·5 cites·21 claims
- 0290US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0385US7459701B2Stage apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 2, 2008·12 cites·20 claims
- 0477US7440076B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Oct 21, 2008·5 cites·35 claims
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