Inventor · disambiguated record
Jan Frederik Hoogkamp
Also filed as: HOOGKAMP JAN F · HOOGKAMP JAN FREDERIK
14 granted patents·4 pending applications·71 citations·filing 2004–2012
90Inventor score
Top patents by PatentIndex Score
18 records- 0185US7459701B2Stage apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 2, 2008·12 cites·20 claims
- 0278US7878755B2Load lock and method for transferring objectsASML NETHERLANDS BV·Filed 2008·Granted Feb 1, 2011·8 cites·11 claims
- 0375US9500953B2Radiation sourceASML NETHERLANDS BV·Filed 2012·Granted Nov 22, 2016·4 cites·29 claims
- 0468US7486384B2Lithographic support structureASML NETHERLANDS BV·Filed 2004·Granted Feb 3, 2009·11 cites·25 claims
- 0564US7359031B2Lithographic projection assembly, load lock and method for transferring objectsASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·12 cites·25 claims
- 0654US7123349B2Lithographic projection assembly, substrate handling apparatus and substrate handling methodASML NETHERLANDS BV·Filed 2004·Granted Oct 17, 2006·5 cites·18 claims
- 0750US7408615B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 5, 2008·3 cites·41 claims
- 0850US2008297758A1Lithographic support structureASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 0948US7394520B2Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lockASML NETHERLANDS BV·Filed 2004·Granted Jul 1, 2008·10 cites·25 claims
- 1048US7345736B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 18, 2008·2 cites·20 claims
- 1147US7576831B2Method and apparatus for maintaining a machine partASML NETHERLANDS BV·Filed 2004·Granted Aug 18, 2009·2 cites·19 claims
- 1244US7106420B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 12, 2006·1 cites·35 claims
- 1339US7131999B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Nov 7, 2006·0 cites·24 claims
- 1437US7394525B2Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 1, 2008·0 cites·35 claims
- 1537US2007228295A1Lithographic Apparatus, Support, Device Manufacturing Method, and a Method of SupportingASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1637US2005002003A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1736US2015261095A1Radiation SourceJANSEN BASTIAAN STEPHANUS HENDRICUS·Filed 2012·Application pending·0 cites
- 1834US7349067B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·1 cites·15 claims
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