Inventor · disambiguated record
Chris Steely
Also filed as: STEELY CHRIS
6 granted patents·2 citations·filing 2019–2023
68Inventor score
Files withKLA CORP6
Top patents by PatentIndex Score
6 records- 0192US11862524B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jan 2, 2024·2 cites·20 claims
- 0280US12055859B2Overlay mark design for electron beam overlayKLA CORP·Filed 2023·Granted Aug 6, 2024·0 cites·15 claims
- 0370US11703767B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jul 18, 2023·0 cites·10 claims
- 0463US11467503B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2021·Granted Oct 11, 2022·0 cites·22 claims
- 0559US10990022B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2019·Granted Apr 27, 2021·0 cites·13 claims
- 0656US11720031B2Overlay design for electron beam and scatterometry overlay measurementsKLA CORP·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
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