Inventor · disambiguated record
Diana Shaphirov
Also filed as: SHAPHIROV DIANA
5 granted patents·1 pending application·5 citations·filing 2019–2024
69Inventor score
Technology areasG03F
Files withKLA CORP6
Top patents by PatentIndex Score
6 records- 0195US12105433B2Imaging overlay targets using moiré elements and rotational symmetry arrangementsKLA CORP·Filed 2022·Granted Oct 1, 2024·2 cites·6 claims
- 0287US12111580B2Optical metrology utilizing short-wave infrared wavelengthsKLA CORP·Filed 2021·Granted Oct 8, 2024·2 cites·38 claims
- 0384US2025021019A1Imaging overlay targets using moiré elements and rotational symmetry arrangementsKLA CORP·Filed 2024·Application pending·0 cites
- 0480US11256177B2Imaging overlay targets using Moiré elements and rotational symmetry arrangementsKLA CORP·Filed 2020·Granted Feb 22, 2022·1 cites·44 claims
- 0563US11467503B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2021·Granted Oct 11, 2022·0 cites·22 claims
- 0659US10990022B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2019·Granted Apr 27, 2021·0 cites·13 claims
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