Inventor · disambiguated record
Dirk-Jan Bijvoet
Also filed as: BIJVOET DIRK-JAN
20 granted patents·1 pending application·52 citations·filing 2004–2010
92Inventor score
Files withASML NETHERLANDS BV17BIJVOET DIRK-JAN1DE VOS YOUSSEF KAREL MARIA1HEMPENIUS PETER PAUL1VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS1
Top patents by PatentIndex Score
21 records- 0185US7459701B2Stage apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 2, 2008·12 cites·20 claims
- 0284US8345265B2Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning deviceASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·7 cites·15 claims
- 0382US7633600B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 15, 2009·6 cites·16 claims
- 0476US7884919B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Feb 8, 2011·4 cites·39 claims
- 0572US7675607B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 9, 2010·3 cites·23 claims
- 0670US8928860B2Lithographic apparatus having a chuck with a visco-elastic damping layerHEMPENIUS PETER PAUL·Filed 2009·Granted Jan 6, 2015·4 cites·25 claims
- 0767US7372549B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·2 cites·20 claims
- 0865US7525636B2Lithographic apparatus and exposure methodASML NETHERLANDS BV·Filed 2007·Granted Apr 28, 2009·2 cites·13 claims
- 0963US8330940B2Lithographic apparatus, device manufacturing method and position control methodBIJVOET DIRK-JAN·Filed 2009·Granted Dec 11, 2012·2 cites·19 claims
- 1063US7933000B2Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning deviceASML NETHERLANDS BV·Filed 2006·Granted Apr 26, 2011·1 cites·13 claims
- 1150US7408615B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 5, 2008·3 cites·41 claims
- 1249US8384881B2Lithographic apparatus, stage apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Feb 26, 2013·0 cites·21 claims
- 1348US7345736B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 18, 2008·2 cites·20 claims
- 1446US7355677B2System and method for an improved illumination system in a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 8, 2008·1 cites·13 claims
- 1546US7151591B2Alignment system, alignment method, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·1 cites·29 claims
- 1644US7106420B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 12, 2006·1 cites·35 claims
- 1743US8400617B2Lithographic apparatus having a substrate support with open cell plastic foam partsVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2010·Granted Mar 19, 2013·0 cites·17 claims
- 1843US7733463B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jun 8, 2010·0 cites·18 claims
- 1937US8830442B2Servo control system, lithographic apparatus and control methodDE VOS YOUSSEF KAREL MARIA·Filed 2008·Granted Sep 9, 2014·0 cites·17 claims
- 2037US2007228295A1Lithographic Apparatus, Support, Device Manufacturing Method, and a Method of SupportingASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 2134US7349067B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·1 cites·15 claims
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