Inventor · disambiguated record
Jesse N. Klein
Also filed as: KLEIN JESSE N
9 granted patents·156 citations·filing 2003–2019
88Inventor score
Top patents by PatentIndex Score
9 records- 0196US10741363B1Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matchingMKS INSTR INC·Filed 2019·Granted Aug 11, 2020·38 cites·26 claims
- 0296US10546724B2Pulsed, bidirectional radio frequency source/loadMKS INSTR INC·Filed 2018·Granted Jan 28, 2020·40 cites·47 claims
- 0385US10930470B2Pulsed, bidirectional radio frequency source/loadMKS INSTR INC·Filed 2019·Granted Feb 23, 2021·3 cites·20 claims
- 0485US9316675B2Secondary plasma detection systems and methodsMKS INSTR INC·Filed 2013·Granted Apr 19, 2016·7 cites·28 claims
- 0583US6995545B2Control system for a sputtering systemMKS INSTR INC·Filed 2003·Granted Feb 7, 2006·32 cites·33 claims
- 0677US7206210B2Power supply control loop with multiple leveling modesMKS INSTR INC·Filed 2004·Granted Apr 17, 2007·29 cites·33 claims
- 0772US9613784B2Sputtering system and method including an arc detectionKLEIN JESSE N·Filed 2008·Granted Apr 4, 2017·6 cites·12 claims
- 0850US10607821B2Sputtering system and method including an arc detectionMKS INSTR INC·Filed 2017·Granted Mar 31, 2020·0 cites·6 claims
- 0945US7336511B2Power supply control loop with multiple leveling modesMKS INSTR INC·Filed 2007·Granted Feb 26, 2008·1 cites·20 claims
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