Inventor · disambiguated record
Yasuko Tabata
Also filed as: TABATA YASUKO
7 granted patents·168 citations·filing 1992–2013
86Inventor score
Top patents by PatentIndex Score
7 records- 0196US5364716APattern exposing method using phase shift and mask used thereforFUJITSU LTD·Filed 1992·Granted Nov 15, 1994·116 cites·15 claims
- 0290US8392856B2Semiconductor device and layout design method for the sameMISAKA AKIO·Filed 2011·Granted Mar 5, 2013·13 cites·17 claims
- 0384US8869079B2Semiconductor device and layout design method for the samePANASONIC CORP·Filed 2013·Granted Oct 21, 2014·6 cites·17 claims
- 0474US5472813APattern exposing method using phase shift and mask used thereforFUJITSU LTD·Filed 1994·Granted Dec 5, 1995·24 cites·5 claims
- 0568US8330248B2Semiconductor device, mask for fabrication of semiconductor device, and optical proximity correction methodTABATA YASUKO·Filed 2011·Granted Dec 11, 2012·3 cites·20 claims
- 0652US6791668B2Semiconductor manufacturing apparatus and methodWINBOND ELECTRONICS CORP·Filed 2002·Granted Sep 14, 2004·3 cites·7 claims
- 0734US5994004ALevenson type phase shift photomask and manufacture method of semiconductor device using such photomaskFUJITSU LTD·Filed 1998·Granted Nov 30, 1999·3 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →