Inventor · disambiguated record
Akio Misaka
Also filed as: MISAKA AKIO
52 granted patents·5 pending applications·1,005 citations·filing 1990–2024
98Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD24PANASONIC CORP20SAMSUNG ELECTRONICS CO LTD7MISAKA AKIO2PANASONIC IP MAN CO LTD2
Top patents by PatentIndex Score
57 records- 0199US6691297B1Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSIMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Feb 10, 2004·348 cites·10 claims
- 0298US7103870B2Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSIMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Sep 5, 2006·220 cites·12 claims
- 0397US7569312B2Mask data creation methodPANASONIC CORP·Filed 2006·Granted Aug 4, 2009·30 cites·9 claims
- 0494US7404165B2Method for planning layout for LSI pattern, method for forming LSI pattern and method for generating mask data for LSIMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted Jul 22, 2008·14 cites·11 claims
- 0591US7897298B2Photomask, photomask fabrication method, pattern formation method using the photomask and mask data creation methodPANASONIC CORP·Filed 2007·Granted Mar 1, 2011·12 cites·36 claims
- 0690US8392856B2Semiconductor device and layout design method for the sameMISAKA AKIO·Filed 2011·Granted Mar 5, 2013·13 cites·17 claims
- 0789US7147975B2PhotomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Dec 12, 2006·26 cites·24 claims
- 0888US9291889B2Photo mask and method for forming pattern using the samePANASONIC CORP·Filed 2014·Granted Mar 22, 2016·9 cites·16 claims
- 0986US6703168B1PhotomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Mar 9, 2004·19 cites·23 claims
- 1086US5182718AMethod and apparatus for writing a pattern on a semiconductor sample based on a resist pattern corrected for proximity effects resulting from direct exposure of the sample by a charged-particle beam or lightMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1990·Granted Jan 26, 1993·107 cites·24 claims
- 1185US12299368B2Method of manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 13, 2025·1 cites·20 claims
- 1285US8095894B2Changing a design rule for forming LSI pattern based on evaluating effectiveness of optical proximity corrected patternsMISAKA AKIO·Filed 2008·Granted Jan 10, 2012·11 cites·13 claims
- 1384US10962874B2Methods of manufacturing semiconductor devices, method sof performing extreme ultraviolet ray exposure, and methods of performing optical proximity correctionSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 30, 2021·2 cites·20 claims
- 1484US8869079B2Semiconductor device and layout design method for the samePANASONIC CORP·Filed 2013·Granted Oct 21, 2014·6 cites·17 claims
- 1583US7250248B2Method for forming pattern using a photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted Jul 31, 2007·5 cites·31 claims
- 1682US7790337B2Photomask, pattern formation method using the same and mask data creation methodPANASONIC CORP·Filed 2007·Granted Sep 7, 2010·6 cites·36 claims
- 1782US7332250B2PhotomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Feb 19, 2008·15 cites·36 claims
- 1881US7914953B2Photomask and pattern formation method using the samePANASONIC CORP·Filed 2008·Granted Mar 29, 2011·5 cites·19 claims
- 1980US9658524B2Photomask, and method for creating pattern data thereof, and pattern forming method and processing method using photomaskPANASONIC IP MAN CO LTD·Filed 2015·Granted May 23, 2017·2 cites·19 claims
- 2080US7625678B2Mask data creation methodPANASONIC CORP·Filed 2007·Granted Dec 1, 2009·4 cites·15 claims
- 2180US7060398B2Photomask, method for producing the same, and method for forming pattern using the photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Jun 13, 2006·13 cites·40 claims
- 2278US7205077B2Method for producing photomask and method for producing photomask pattern layoutMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted Apr 17, 2007·3 cites·25 claims
- 2378US7045255B2Photomask and method for producing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted May 16, 2006·12 cites·35 claims
- 2477US7618754B2Pattern formation methodPANASONIC CORP·Filed 2007·Granted Nov 17, 2009·3 cites·24 claims
- 2577US7144684B2Method for forming pattern using photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted Dec 5, 2006·3 cites·37 claims
- 2677US7060395B2Photomask, method for forming the same,and method for designing mask patternMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Jun 13, 2006·15 cites·48 claims
- 2775US7001694B2Photomask and method for producing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Feb 21, 2006·10 cites·44 claims
- 2872US7998641B2Photomask and pattern formation method using the samePANASONIC CORP·Filed 2008·Granted Aug 16, 2011·3 cites·22 claims
- 2972US7524620B2Pattern formation methodPANASONIC CORP·Filed 2006·Granted Apr 28, 2009·2 cites·30 claims
- 3072US7501213B2Method for forming generating mask dataPANASONIC CORP·Filed 2006·Granted Mar 10, 2009·2 cites·24 claims
- 3170US9046783B2Photomask, and pattern formation method and exposure apparatus using the photomaskPANASONIC CORP·Filed 2013·Granted Jun 2, 2015·1 cites·25 claims
- 3269US7771902B2Photomask, fabrication method for the same and pattern formation method using the samePANASONIC CORP·Filed 2007·Granted Aug 10, 2010·2 cites·29 claims
- 3368US8330248B2Semiconductor device, mask for fabrication of semiconductor device, and optical proximity correction methodTABATA YASUKO·Filed 2011·Granted Dec 11, 2012·3 cites·20 claims
- 3468US7468240B2Patterning method using photomaskPANASONIC CORP·Filed 2007·Granted Dec 23, 2008·1 cites·6 claims
- 3567US7449285B2Method for forming patternPANASONIC CORP·Filed 2006·Granted Nov 11, 2008·1 cites·40 claims
- 3667US7378198B2PhotomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted May 27, 2008·1 cites·18 claims
- 3766US7282309B2Photomask, method for producing the same, and method for forming pattern using the photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted Oct 16, 2007·1 cites·20 claims
- 3865US7504186B2Photomask, method for producing the same, and method for forming pattern using the photomaskPANASONIC CORP·Filed 2007·Granted Mar 17, 2009·1 cites·15 claims
- 3965US4998020AElectron beam exposure evaluation methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1990·Granted Mar 5, 1991·19 cites·6 claims
- 4064US7364822B2Photomask, method for forming the same, and method for forming pattern using the photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted Apr 29, 2008·1 cites·13 claims
- 4164US7361436B2Pattern formation methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted Apr 22, 2008·1 cites·26 claims
- 4264US5421934ADry-etching process simulatorMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1993·Granted Jun 6, 1995·44 cites·6 claims
- 4361US11698581B2Method and computing device for manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·19 claims
- 4461US8007959B2Photomask and pattern formation method using the samePANASONIC CORP·Filed 2008·Granted Aug 30, 2011·1 cites·24 claims
- 4560US8278014B2Photomask and pattern formation method using the sameIRIE SHIGEO·Filed 2011·Granted Oct 2, 2012·1 cites·13 claims
- 4659US2025093763A1Photomask and method of manufacturing integrated circuit device by using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 4758US2024219824A1Reflective mask for extreme ultraviolet lithography and a method of fabricating a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 4857US12437138B2Layout method of semiconductor chip, semiconductor chip manufacturing method and computing device using sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 7, 2025·0 cites·20 claims
- 4953US7842436B2PhotomaskPANASONIC CORP·Filed 2004·Granted Nov 30, 2010·3 cites·19 claims
- 5050US7001711B2Patterning method using a photomaskMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Feb 21, 2006·1 cites·27 claims
Showing the top 50 of 57 patent records by PatentIndex Score.
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