Inventor · disambiguated record
Michael Sievers
Also filed as: SIEVERS MICHAEL · SIEVERS MICHAEL R · SIEVERS MICHAEL RAY
24 granted patents·8 pending applications·285 citations·filing 2000–2020
94Inventor score
Top patents by PatentIndex Score
32 records- 0198US7859013B2Metal oxide field effect transistor with a sharp haloIBM·Filed 2007·Granted Dec 28, 2010·100 cites·17 claims
- 0290US6444124B1System and method for improved treatment of wastewaterFiled 2000·Granted Sep 3, 2002·104 cites·22 claims
- 0388US7119333B2Ion detector for ion beam applicationsIBM·Filed 2004·Granted Oct 10, 2006·34 cites·20 claims
- 0475US6730237B2Focused ion beam process for removal of copperIBM·Filed 2001·Granted May 4, 2004·21 cites·11 claims
- 0574US7754615B2Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC currentTOKYO ELECTRON LTD·Filed 2006·Granted Jul 13, 2010·4 cites·12 claims
- 0673US10800693B2Method and arrangement for wastewater treatmentBMA BRAUNSCHWEIGISCHE MASCHINENBAUANSTALT AG·Filed 2015·Granted Oct 13, 2020·1 cites·21 claims
- 0768US7384835B2Metal oxide field effect transistor with a sharp halo and a method of forming the transistorIBM·Filed 2006·Granted Jun 10, 2008·3 cites·16 claims
- 0867US9556049B2Method for treating sewage sludge and wastewater treatment plantEWERT WOLFGANG·Filed 2012·Granted Jan 31, 2017·2 cites·12 claims
- 0966US8680458B2Data transmission through optical viasSIEVERS MICHAEL·Filed 2010·Granted Mar 25, 2014·2 cites·18 claims
- 1065US8641902B2Method for wastewater treatment and wastewater treatment systemEWERT WOLFGANG·Filed 2009·Granted Feb 4, 2014·2 cites·28 claims
- 1163US7659616B2On-chip cooling systems for integrated circuitsIBM·Filed 2007·Granted Feb 9, 2010·2 cites·15 claims
- 1262US9611521B2Extraction of gallium and/or arsenic from gallium arsenideEMPIRE TECHNOLOGY DEV LLC·Filed 2013·Granted Apr 4, 2017·0 cites·15 claims
- 1362US6900137B2Dry etch process to edit copper linesIBM·Filed 2003·Granted May 31, 2005·10 cites·20 claims
- 1459US8933390B2Data transmission through optical viasEMPIRE TECHNOLOGY DEV LLC·Filed 2014·Granted Jan 13, 2015·0 cites·21 claims
- 1551US8603216B2Extraction of gallium and/or arsenic from gallium arsenideSIEVERS MICHAEL R·Filed 2011·Granted Dec 10, 2013·0 cites·11 claims
- 1650US7278300B2Gas filled reactive atomic force microscope probeIBM·Filed 2005·Granted Oct 9, 2007·0 cites·20 claims
- 1747US8492295B2On-chip cooling for integrated circuitsKUMAR KAUSHIK A·Filed 2012·Granted Jul 23, 2013·0 cites·10 claims
- 1847US7256399B2Non-destructive in-situ elemental profilingIBM·Filed 2005·Granted Aug 14, 2007·0 cites·18 claims
- 1945US8008209B2Thermal gradient control of high aspect ratio etching and deposition processesIBM·Filed 2007·Granted Aug 30, 2011·0 cites·14 claims
- 2043US2008233709A1Method for removing material from a semiconductorINFINEON TECHNOLOGIES CORP·Filed 2007·Application pending·0 cites
- 2143US2021039969A1Electrochemical Precipitation Reactor With a Moving ElectrodeEISENHUTH GMBH & CO KG·Filed 2020·Application pending·0 cites
- 2242US8298966B2On-chip cooling systems for integrated circuitsKUMAR KAUSHIK A·Filed 2010·Granted Oct 30, 2012·0 cites·12 claims
- 2341US7285775B2Endpoint detection for the patterning of layered materialsIBM·Filed 2004·Granted Oct 23, 2007·0 cites·19 claims
- 2441US6843893B2Metal dry etch using electronic fieldIBM·Filed 2002·Granted Jan 18, 2005·0 cites·13 claims
- 2541US2008078743A1Elevated temperature chemical oxide removal module and processMUNOZ ANDRES F·Filed 2006·Application pending·0 cites
- 2638US2005016954A1System and methods of altering a very small surface areaIBM·Filed 2003·Application pending·0 cites
- 2738US2004060904A1Tool having a plurality of electrodes and corresponding method of altering a very small surfaceIBM·Filed 2002·Application pending·0 cites
- 2838US2005016952A1System and method of altering a very small surface area by multiple channel probeIBM·Filed 2003·Application pending·0 cites
- 2937US10637089B2Method and apparatus for bio-electrically generating power from organic ingredients of a waste waterEISENHUTH GMBH & CO KG·Filed 2017·Granted Apr 28, 2020·0 cites·16 claims
- 3037US2007056930A1Polysilicon etching methodsSONY ELECTRONICS INC·Filed 2005·Application pending·0 cites
- 3134US2004132287A1Dry etch process for copperIBM·Filed 2003·Application pending·0 cites
- 3231US7135112B2Flocculation apparatus for treating colloidal suspensionsCLAUSTHALER UMWELTTECHNIKINSTI·Filed 2002·Granted Nov 14, 2006·0 cites·12 claims
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